
KLA-Tencor Platforms Supported -
PCB repair and test for RS, UV1xx0, and Surface Scan systems
Defect Inspection-ev300, 8100, 8200, es20, es25
Brightfield Inspection- KLA 2131, KLA 2132, KLA 2135, KLA 2138,KLA 2139
Darkfield Inspection- Tencor AIT 1, KLA AIT 2, KLA AIT 3, KLA AIT XP+, KLA Tencor
Spetra Fx
Metrology-Tencor Alpha Step, Tencor Profiler P-1, P-2, P-10, P-12, P-15, P- 20, P-22, Tencor Flexus 2320, 5410
Overlay- KLA 5100XP, KLA 5200XP, KLA Archer 10
Film Thickness-Prometrix UV1050/1080, Tencor UV 1250/1280, KLA Tencor F5x, KLA Tencor Spetra Fx
Surface Metrology- Tencor Surfscan 6100,6200/6220, 6400/6420, KLA Tencor SP1 Classic, KLA Tencor SP1 TBI
Resistivity- Tencor MGage, Tencor NC110, Prometrix VP10, Prometrix RS35,
RS55, RS75, KLA Tencor RS100